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BS78
LASERSCALE™
Compact LASERSCALE™ with zero point and a resolution of 0.07nm. Capable of high accuracy and high speed measurement supporting the next generation of semiconductor design.
- High-resolution scale with signal wavelength of 0.1379 µm that out-performs light wave interferometer systems
- High stability that is not affected by humidity, air pressure, and air disturbances
- Newly designed optics used in zero point.
- Zero point accuracy ±0.1µm
- Accuracy: ±0.04µm (40 mm measuring length)
- Complete non-contact design. Return error is theoretically eliminated.
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