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BH25
Compact, low-profile, reflective LASERSCALE™
High-accuracy, reflective LASERSCALE™ with signal wavelength of 250nm. Ideal for low-profile stages, semiconductor back-end processing equipment, and precision microscopes.
- Signal wavelength: 250nm
- High accuracy: ±1 µm/420nm
- High respsonse speed: 700mm/s
- Maximum resolution: 0.00625nm
- Completely non-contact design. Return error is theoretically eliminated.
- Scale: Blue plate glass/low-expansion glass
- Thin head with a thickness of 12mm
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Supporting various resolutions and output modes
(Depending on the interpolator connected)
- Special non-magnetic and vacuum-compatible models available
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